About

Established in September 2025 with a registered capital of 10 million RMB, Shanghai Chengwei Semiconductor Equipment Co Ltd is a specialized integrated supplier of critical process system equipment for advanced manufacturing. Based in the Songjiang District of Shanghai, the company operates a 4,000 square meter state-of-the-art facility, which includes a 2,500 square meter ultra-clean production area featuring a 500 square meter Class 100 cleanroom. Driven by its core values of Win-Win, Collaboration, and Innovation, the company provides high-purity fluid and gas delivery solutions to leading-edge tech sectors.
The company delivers specialized high-purity hardware, system integration, and professional technical services:

1.Chemical Delivery Equipment (Liquid Systems)

*Chemical Delivery Modules: Automatic chemical supply equipment for both acids/alkalis built with PP or PVC cabinets and organic solvents built with stainless steel. Features dual-drum automatic switching, PFA piping, and sub-micron filtration.
*Chemical Charging Boxes: High-capacity automatic unloading and filtration systems for chemical tankers.
*High-Precision Mixing and Dilution Systems: Advanced blending equipment capable of achieving an ultra-precise dilution accuracy of plus or minus 0.001 percent.
*Slurry Delivery Systems: Specialized 24-hour continuous-circulation delivery systems for chemical mechanical planarization slurries, featuring magnetic levitation pumps and high-precision electronic weighing scales.
*Valve Manifold Boxes and Panels: Safe multi-channel chemical distribution systems.

2.Ultra-High Purity Gas Systems

*Gas Cabinets and Gas Racks: Automated gas delivery systems engineered with multi-stage safety interlocks, nitrogen purging, and vacuum purging to safely handle toxic, flammable, and corrosive gases.
*Bulk Special Gas Systems and High-Precision Gas Mixing Systems.
*Liquid Delivery Systems: Advanced chemical vapor source delivery setups for TEOS, TMA, and DEZ.

3.Automation and Smart Control Systems

*Chemical Management Systems: Real-time graphical tracking of fluid levels, leak detection, and historical data logging.
*Gas Detection and Monitoring Systems: Factory-wide gas leak detection networks featuring rapid response alarms, automatic emergency shut-offs, and safety broadcasting integration.